Laser Drilling

Laser radiation can be used to produce holes with diameters ranging from less than one micrometer to several millimeters while achieving large drilling depths simultaneously. Fraunhofer ILT develops and improves various drilling processes for industrial use. Areas of application are diverse and include aerospace, toolmaking and tool technology, the automotive industry, electronics and display technology, as well as medical and energy technology.

Drilling with laser radiation is used as a manufacturing technology for complex geometries and materials. With helical drilling and ultra-short pulsed lasers hole diameters in the range of a few 10 μm at drilling depths of up to 2 mm cam be produced. Large hole diameters above 100 µm can be produced with QCW lasers using (5-axis) trepanning. This also enables the creation of three-dimensional shaped holes. Novel laser drilling processes with drilling rates of up to 12,000 holes/s are also available for applications in filter and sieve technology or coating masks. For the structuring of dielectric materials such as glass, sapphire and other difficult-to-machine materials, combined processes are used in which structures with nanometer precision, even in volume, can be produced via material modification and subsequent etching steps.

Fraunhofer ILT develops manufacturing processes and production systems that are customized to the respective tasks. The range of services includes market-oriented R&D services in the field of laser beam drilling, market and feasibility studies, support in the areas of design and simulation and comprehensive consulting.

Process development

• Single pulse drilling (especially on-the-fly)
• Percussion drilling
• (5-axis) trepanning
• Helical drilling
• Ultra-short pulse laser drilling
• Water jet guided laser drilling (Laser Micro Jet)

Materials

• Single crystals, directionally solidified materials, metals, multilayer systems, ceramics, metallic foams, plastics, silicon
• Intermetallic alloys, fiber reinforced composites such as CFRP, CMCs and MMCs

Applications

• Cooling air holes, vent holes, lubricant holes, filter holes, measuring holes
• Turbine components (turbine blades, guide vanes, combustion chambers), filters, vias, injectors, atomizers, tooling, tool making

Equipment

• QCW single- and multimode fiber lasers up to 20 kW pulse peak power
• USP beam sources with average power up to 400 W
• Various pico- and nanosecond pulsed beam sources with wavelengths from 266 to 1064 nm
• 200 ns beam source with 100 W power for the Laser Micro Jet

Henn, M., Hagenlocher, C., Holder, D., Förster, D., Weber, R., Haasler, D., Hummel, M., Olowinsky, A., Beckmann, F., Moosmann, J., Graf, T.:
The progress of microhole formation during laser percussion drilling of steel observed by highspeed synchrotron x-ray imaging.
WLT/Lasers in Manufacturing Conference 2021, International Congress Center, Munich, Germany. Proceedings of World of Photonics, (4 S.), (2024)
https://wlt.de/sites/default/files/2023-09/Contribution_223.pdf

Haasler, D.:
Tiefbohren in Metallen mittels ultrakurzen Laserpulsen.
Dissertation, RWTH Aachen University, 2022, Aachen : Apprimus Verlag 2022, (2022)
https://doi.org/10.18154/RWTH-2022-09683

Haasler, D., Gillner, A.:
Development of a deep drilling process in metals by means of ultrashort laser pulses.
SPIE LASE, 2022 Jan. 21-28, San Francisco, California, United States.
Proceedings Volume 11994, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XI; 119940I (2022). 11994 - (2022)
http://dx.doi.org/10.1117/12.2625590

Lanfermann, A., Barthels, T., Nießen, M., Abels, P., Klass, G., Riester, C., Pham, T.Q., Steffens, O.:
INNOVATIVE FILTER MODULE TO SEPARATE MICROPLASTICS FROM WASTEWATER – SIMCONDRILL.
FILTECH 2022, 8-10. March 8-10, 2022, Cologne, Germany.
FILTECH: March 8-10, 2022, Cologne, Germany:the filtration event, 10 S., (2022)

Lanfermann, A., Barthels, T., Nießen, M., Abels, P., Klass, G., Riester, C., Pham, T.Q., Steffens, O.:
Innovative Filtermodule für die Abscheidung von Mikroplastik aus Abwasser.
GWF: Wasser, Abwasser 163, 51-54 (2022)

Haasler, D., Beckers, C.:
Development of an on-the-fly percussion drilling process based on pulse bursts.
SPIE LASE, 6-12 March 2021, Online Only, California, United States.Proceedings Volume 11679, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems X; 116790E (2021)
http://dx.doi.org/10.1117/12.2576896

Bornschlegel, B., Haasler, D., Finger, J., Grizmann, D., Trautz, M., Gillner, A.:
Deep Drilling of Structural Timber with High Power Ultrashort Pulsed Laser Radiation.
Journal of Laser Micro&Nanoengineering 15195-203 (2020)
https://doi.org/10.2961/jlmn.2020.03.2007  

He, C, Weber M., Gillner A.:
Recast-Free Helical Drilling of Fused Silica Using SHG Picosecond Laser Pulses.
Journal of Laser Micro & Nanoengineering 15158-163 (2020)
https://doi.org/10.2961/jlmn.2020.02.2014  

He, C., Weber, M., Gillner, A.:
Recast-free helical drilling of fused silica using SHG picosecond laser pulses.
LPM2020 – the 21st International Symposium on Laser Precision Microfabrication, 23-26 June 2020. Proceedings of LPM2020, (6 S.), (2020)

https://doi.org/10.2961/jlmn.2020.02.2014

Haasler, D., Finger, J.:
Investigation of heat accumulation effects during deep hole percussion drilling by high power ultrashort pulsed laser radiation.
Journal of Laser Applications 3122201- (2019)
https://doi.org/10.2351/7.0004076

Haasler, D., Schneider, T., Poprawe, R.:
Investigation of the ablation rate of stainless steel by means of few ultrashort laser pulses up to 150 J&cm².
LAMP-8th International Congress on Laser Advanced Materials Processing, 21.- 24.5.2019, Hiroshima Japan.
Proceedings of LAMP2019, Ultrashort pulse laser processing, 19-027 (Th3-L2, A120212), (10 S.) - (2019)
https://doi.org/10.2961/jlmn.2019.02.0010

He, C., Esch, D., Gillner, A.:
Adaption of Energy Deposition in Helical Drilling of Multidimensional Micro Holes Using Ultrashort Laser Pulses.
JOURNAL OF LASER MICRO&NANOENGINEERING 14173-178 (2019)
https://doi.org/10.2961/jlmn.2019.02.0010

He, C., Weber, M., Gillner, A.:
Helical drilling of high-aspect-ratio microholes in stainless steel using ultrashort laser pulses.
In: Lasers in Manufacturing 2019 : Munich ICM, Internationales Congress Center München, Germany, June 24-27, 2019 :
World of Photonics Congress / WLT, LiM 2019

He, C., Esch, D., Gillner, A.:
Adaption of energy deposition in helical drilling of multidimensional micro holes using ultrashort laser pulses.
LPM2019-the 20st International Symposium on Laser Precision Microfabrication, May 21-24, 2019. Proceedings of LPM2019, (2019)

He, C., Vannahme, K., Gillner, A.:
High-Efficiency Sub-Micrometer Multi-Beam Interference Structuring for Large-Scale Surface Using Ultrashort Laser Pulses.
JOURNAL OF LASER MICRO&NANOENGINEERING 1495-99 (2019)
https://doi.org/10.2961/jlmn.2019.01.0016

Oppitz, S., Janssen, Stefan:
Combining Laser and Textile Technology for Just-in-Time Production of Composites.
Book of Abstracts & ETT 2018: 8th International Istanbul Textile Conference ; Evolution of Technical Textiles = 8. Uluslararasi Istanbul Tekstil Konferansi : Teknik Tekstillerin Evrimi, 14-16 April = Nisan & Editors: Mehmet Akalin; Ismail 53-53 (2018)

https://doi.org/10.7216/1300759920192611409

He, C., Vannahme, K., Gillner, A.:
High-efficiency sub-micrometer multi-beam interference structuring for large-scale surface using ultrashort laser pulses.
The 19th International Symposium on Laser Precision Microfabrication Edinburgh Conference Centre, Heriot-Watt University, Edinburgh, UK, 25-28 June 2018. Proceedings of LPM2018, #18-042, (X S.), (2018) - (2018)

He, C., Bühring, J., Gillner, A.:
Helical drilling of three-dimensional conical converging-diverging nozzle in steel using ultrashort laser pulses.
Procedia CIRP 74305-309 (2018)
https://doi.org/10.1016/j.procir.2018.08.120

He, C., Buehring, J., Zibner, J., Gillner, A.:
Ultrafast Laser Helical Drilling of Three-Dimensional Shaped Holes using Synchronized Adaption of Energy Deposition.
Journal of Laser Micro&Nanoengineering 1331-35 (2018)
https://doi.org/10.2961/jlmn.2018.01.0007

He, C., Steger, M., Gillner, A.:
High-Efficiency Nanostructuring using Mlti-Beam Interference by Consecutively Deposited Ultrashort Laser Pulses on Tool Steel.
Journal of Laser Micro&Nanoengineering 131-35 (2018)
https://doi.org/10.2961/jlmn.2018.01.0001  

Janssen, S., Eckstein, M.C.:
An Improved Scanning Strategy for Long Pulsed Laser Drilling of Carbon Fiber Textiles.
Journal of Laser Micro&Nanoengineering 1336-46 (2018)
https://doi.org/10.2961/jlmn.2018.01.0008

Nießen,M., Bürgermeister, L., Hambach, N.:
Hot or Cold Ablation – That’s the Question.
LASER TECHNIK JOURNAL 1442-44 (2017)
https://doi.org/10.1002/latj.201700013

He, C., Bühring, J., Zibner, F., Gillner, A.:
Ultrafast laser helical drilling of three-dimensional shaped holes using synchronized adaptation of energy deposition.
LPM 2017. 18th International Symposium on Laser Precision Microfabrication June 5-8, 2017, Toyama Japan. Paper #17-50. 1-5 (2017)

Uchtmann, H., He, C., Gillner, A.:
High precision and high aspect ratio laser drilling: challenges and solutions.
SPIE LASE, 2016, San Franisco, California, United States, Proceedings Volume 9741, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V; 974106 (2016)
https://doi.org/10.1117/12.2222662  

Janssen, S., Reinelt, S., Kelbassa, I., Oppitz, S., Cetin, M.:
Comparison between ps- and µs-laser radiation for drilling holes for force transmission elements in CFRP-preforms.
The 34th International Congress on Applications of Lasers & Electro-Optics (ICALEO® 2015). ICALEO Conference Proceedings, 754- (10 S.), (2015) - (2015)
http://dx.doi.org/10.2351/1.5063226

He, C., Hartmann, C., Fornaroli, C., Zibner, F., Gillner, A.:
Temporal evolution of hole geometry and influences of energy deposition in ultra-short pulse helical drilling.
Lasers in Manufacturing Conference 2015, Munich, June 22-25, 2015 - (2015)

Uchtmann, H., Kürschner, D., Kelbassa, I.:
Hybrid laser drilling of cooling holes by using millisecond pulsed fiber laser radiation and ultrashort pulsed laser radiation.International Congress on Applications of Lasers & Electro–Optics, October 18-22, 2015 , Sheraton Atlanta (Atlanta, GA) , USA , ICALEO , 2015-10-18 - 2015-10-22Paper 2008 (8 S.) 1-8 (2015)
https://doi.org/10.2351/1.5063244

Uchtmann, H., Kürschner, D., Kelbassa, I.:
Hybrid laser drilling of cooling holes by using millisecond pulsed fiber laser radiation and ultrashort pulsed laser radiation.
LAMP2015 - The 7th International Congress on Laser Advanced Materials Processing, Kitakyushu, Fukuoka, Japan,26. bis 29. Mai 2015 1-7 (2015)
https://doi.org/10.2351/1.5063244

Trautz, M., Koj, C., Uchtmann, H.:
Laserstrahlbohrungen für richtungsgenau positionierte Vollgewindeschrauben – Einbau und Tragverhalten.
Bautechnik 92403-411 (2015)
https://doi.org/10.1002/bate.201400075

Zibner, F., Gretzki, P., Holtkamp, J., Gillner, A.:
Ultrahigh-speed separation process using a combination of gas-supported laser ablation and laser cutting.
Proceedings 33rd International Congress on Applications of Lasers & Electro–Optics (ICALEO), October 19-23, 2014, San Diego, CA, USA. Paper 907 - (2014)
https://doi.org/10.2351/1.5063109

Zibner, F., Fornaroli, C., Ryll, J., He, C., Holtkamp, J., Gillner, A.:
Ultra-high-precision helical laser cutting of sapphire.
ICALEO® 2014: 33rd International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing, 26-31, (2014)
https://doi.org/10.2351/1.5063070

Uchtmann, H., Friedrichs, M., Kelbassa, I.:
Drilling of cooling holes by using high power ultrashort pulsed laser radiation.
ICALEO October 19-23, 2014. International Congress on Applications of Lasers & Electro–Optics, Sheraton San Diego (San Diego, CA, USA 1-5 (2014)
https://doi.org/10.2351/1.5063117

He, C., Zibner, F., Fornaroli, C., Ryll, J., Holtkamp, J., Gillner, A. :
High-precision helical cutting using ultra-short laser pulses.
Physics Procedia  561066-1072 (2014)
https://doi.org/10.1016/j.phpro.2014.08.019  (Open Access)

Zibner, F., Ryll, J., Holtkamp, J., Gillner, A.:
High precision 2.5D laser cutting of thin nitinol and polyurethane for medical applications.
ICALEO, 32nd International Congress on Applications of Lasers & Electro-Optics: October 6-10, 2013, Miama&Fl., USA. Congress general chair: Stefan Kaierle, LZH Hannover. Orlando:Fl.: LIA 4154-4154 (2013)

https://doi.org/10.2351/1.506297

Uchtmann, H., Kelbassa, I.:
Cax process chain for laser drilling of tool molds.
ICALEO, 32nd International Congress on Applications of Lasers & Electro-Optics: October 6-10, 2013, Miama&Fl., USA. Congress general chair: Stefan Kaierle, LZH Hannover. Orlando:Fl.: LIA 702-702 (2013)
https://doi.org/10.2351/1.5062873

Janssen, S., Uchtmann, H., Kelbassa, I.:
Determination of the bore hole diameter by analyzing process emissions.
ICALEO, 32nd International Congress on Applications of Lasers & Electro-Optics: October 6-10, 2013, Miama&Fl., USA. Congress general chair: Stefan Kaierle, LZH Hannover 701-701 (2013)
https://doi.org/10.2351/1.5062977

Uchtmann, H., Dietrich, J., Kelbassa, I.,Pulse shaping during laser percussion drilling by using fiber laser radiation.ICALEO . 31. Int. Congress on Applications of Lasers and Electro- Optics, September 23-27, 2012 International Congress on Applications of Lasers & Electro–Optics, Anaheim, CA, USA, September 23-27, 2012 1-5 (2012)
https://doi.org/10.2351/1.5062499