Glass Processing

Using ultrashort pulsed laser radiation, transparent materials such as glasses, crystals or ceramics can be ablated, cut, drilled or structured with high precision for a variety of applications. By selectively ablating glass surfaces, for example, markings or scattering centers can be generated for the decoupling of light. Furthermore, material modifications and high-precision structures can be selectively introduced into the volume of transparent materials. Selective laser-induced etching (SLE) offers the possibility of producing any 3D structures and complex components from glass or other materials. In this way, even hollow bodies with complex geometries can be produced in the volume of sapphire, for example, which cannot be produced using conventional methods. This enables the production of complex microfluidics for medical technology, for example. The SLE process is also suitable as a high-precision manufacturing technology for photonic-integrated chips and applications in the field of quantum technologies.

Due to the increasing use of aspheres and free-form optics, for example in lighting or imaging technology, the need for economical manufacturing processes for optics with non-spherical surfaces is growing. The laser ablation and laser polishing of glasses developed at Fraunhofer ILT offers flexible and cost-effective alternatives to conventional methods. Polishing is based on the remelting of a thin surface layer of the workpiece and smoothing of the surface as a result of interfacial tension.

The range of services includes feasibility studies, the development of application-specific laser processes, support in integrating new technologies into industrial manufacturing processes, simulation and modeling, and individual consulting.

Surface structuring and drilling

• Selective ablation and structuring of surfaces
• Production of surface channels, e.g. for cell and microfluidic applications
• Drilling of holes with diameters down to the submicrometer range, e.g. for applications in filter and sieve technology or for coating masks
  

In-volume structuring

• Waveguides for optical communication
• Integrated structures
• Security markings
  

Cutting of transparent materials

• Processing of glass and sapphire

Selective laser-induced etching SLE

• Fabrication of arbitrary 3D components
• Structures for 3D microfluidic systems
  

Contact: Martin Kratz M.Sc.

Telephone: +49 241 8906-581
E-Mail: martin.kratz@ilt.fraunhofer.de

Laser polishing and ablation

• Manufacturing of form and polishing of aspheres and freeform surfaces of glass and fused silica
• Shape correction by laser beam figuring
• Laser polishing of micro-/opto-fluidics
  

Contact: Dr. Edgar Willenborg

Telephone: +49 241 8906-213
E-Mail: edgar.willenborg@ilt.fraunhofer.de

Kratz, M., Kniffler, M., Häfner, C. L.:
Influence of flexible multibeam intensity distributions on selective laser-induced etching process regimes.
OPTICS EXPRESS 32(21), 36453-36468, (2024)
https://doi.org/10.1364/OE.532425 (Open Access)

Wollesen, L., Douissard, P., Pauwels, K., Baillard, A., Loiko, P., Brasse, G., Mathieu, J., Simeth, S., Kratz, M., Dujardin, C., Camy, P., Martin, T.:
Microstructured growth by liquid phase epitaxy of scintillating Gd3Ga5O12 (GGG) doped with Eu3+.
Journal of Alloys and Compounds 1010, 177267, (7 S.), (2024)
http://dx.doi.org/10.1016/j.jallcom.2024.177267

Douissard, P.-A., Wollesen, L., Pauwels, K, Loiko, P., Brasse, G., Simeth, S. J., Reininghaus, M., Mathieu, J., Dujardin, C., Camy, P., Martin, T.:
Micro-patterning of scintillating films by Liquid Phase Epitaxy: A proof of concept.
OPTICAL MATERIALS 149, 114939, (11 S.), (2024)
https://doi.org/10.1016/j.optmat.2024.114939

Peters, C., Geppert, B., Dashjav, E., Kratz, M., Tietz, F.:
Glass molding tools fabricated with Selective Laser-induced Etching for sustainable treatment of solid-state electrolytes.
Journal of Laser Micro/Nanoengineering 19(1), (8 S.), (2024)
https://doi.org/10.2961/jlmn.2024.01.2014 (Open Access)

Peters, C., Kratz, M., Köller, J.,Borzeck, S., Simeth, S.:
Selective Laser-induced Etching (SLE) of Transparent Materials for Microelectronic Components and Quantum Computing Applications.
Photonic West 2024, SPIE LASE, 2024, San Francisco, California, United States. Proceedings Volume 12873, Laser-based Micro- and Nanoprocessing XVIII; 28730A (2024)
https://doi.org/10.1117/12.2692475

Beckmann, L., Bi, T., Thoms, J., Wenk, M., Zhang, S., Kratz, M., Del'Haye, P.:
Selective laser-induced etching for novel 3D microphotonic devices.
SPIE LASE, 2024, San Francisco, California, United States, 27 January - 1 February 2024.
Proc. Vol. 12873, Laser-based Micro- and Nanoprocessing XVIII; 1287303 (2024)
http://dx.doi.org/10.1117/12.3002335

Simeth, S., Müller, A., Müller, J., Lekitsch, B., Reininghaus, M., Schmidt-Kaler, F.:
Selective laser-induced etching for 3D ion traps.
SPIE LASE, 2023, San Francisco, California, United States, 28 January - 3 February 2023, San Francisco, California, United States. Proceedings Volume 12409, Laser-based Micro- and Nanoprocessing XVII; 1240902 (2023)
http://dx.doi.org/10.1117/12.2647189

Kratz, M., Rückle, L., Kalupka, C., Reininghaus, M., Häfner, C.:
Dynamic correction of optical aberrations for height-independent selective laser induced etching processing strategies.
OPTICS EXPRESS 31, 26104-26119 (2023)
https://doi.org/10.1364/OE.493088

Raguse, M., Klein, S., Baer, P., Giesberts, M., Traub, M., Hoffmann, H-D.:
Investigations on high-reflective Fiber-Bragg-Gratings in multimode fibers.
OSA Continuum 1(5), 965-973, (2022)
https://doi.org/10.1364/OPTCON.450150 (Open Access)

Nguyen, N.-P., Schnabel, J.:
Glas und Kunststoff vereint.
KUNSTSTOFFE, 39-41 (2020)

Gillet, V., Aubignat, E., Costil, S., Courant, B., Langlade, C., Casari, P., Knapp, W., Planche, M.P.:
Development of low pressure cold sprayed copper coatings on carbon fiber reinforced polymer (CFRP).
SURFACE & COATINGS TECHNOLOGY 364, 306-316 (2019)
https://doi.org/10.1016/j.surfcoat.2019.01.011

Kalupka C., Schmalstieg, M., Reininghaus, M.:
Ultrashort Pulse Processing of Transparent Ceramics: The Role of Electronic and Thermal Damage Mechanisms.
J LASER MICRO NANOEN13 (2), 126-130 (2018)
https://doi.org/10.2961/jlmn.2018.02.0012

Boehr, S., Nolis, P., Brenner, A., Reininghaus, M., Lamß, M., Müller, B. :
Laserbasierte Fertigungstechniken und additive Fertigung.
Galvanotechnik 108, 1672-1677 (6 S.) (2017)

Kalupka, C., Großmann, D., Reininghaus, M.:
Evolution of energy deposition during glass cutting with pulsed femtosecond laser radiation
Appl. Phys. A 123 (5), 376 (7 S.) (2017)
https://doi.org/10.1007/s00339-017-1000-8

Knapp, W., Gillet, V., Courant, B., Aubignat, E., Costil, S., Langlade, C.:
Enhancement of low pressure cold sprayed copper coating adhesion by laser texturing on aluminium substrates
Proc. SPIE 10097, 100970P (13 S.) (2017)
https://doi.org/10.1117/12.2250870

Grossmann, D., Reininghaus, M., Kalupka, C., Kumkar, M., Poprawe, R.:
Transverse pump-probe microscopy of moving breakdown, filamentation and self-organized absorption in alkali aluminosilicate glass using ultrashort pulse laser
Opt. Expr. 24 (20), 23221-23231 (2016)
https://doi.org/10.1364/OE.24.023221

Pütsch, O., Temmler, A., Stollenwerk, J., Willenborg, E., Loosen, P.:
Active optical system for advanced 3D surface structuring by laser remelting
Proceedings of SPIE 9356 (10 S.) (2015)
https://doi.org/10.1117/12.2076051

Jauer, L., Leonards, H.:
3D-Druck und Biofabrikation
RWTH-Themen (1), 42-45 (2014)
https://doi.org/10.18154/RWTH-CONV-089305

Gottmann, J., Hermans, M., Ortmann, J.:
Microcutting and hollow 3D microstructures in glasses by In-volume Selective Laser-induced Etiching (ISLE)
J. Laser Micro/Nanoneng. 8 (1), 15-18 (2013)
https://doi.org/10.2961/jlmn.2013.01.0004

Schaefer, D., Gottmann, J., Hermans, M., Ortmann, J., Kelbassa, I.:
High speed micro scanner for 3D in-volume laser micro-processing
Laser-based Micro- and Nanopackaging and Assembly VII.
Proc. SPIE 8608, (6 S.) (2013)
https://doi.org/10.1117/12.2008205

Schaefer, D., Schnitzler, D., Kelbassa, I.:
Fundamental processes of refractive index modifications during femtosecond laser waveguide writing
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, Proc. SPIE 8613, X1-7, (2013)
https://doi.org/10.1117/12.2004279

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